Shuttleline® Platform PECVD Supports Thin-Film Processing

April 1, 2026

Shuttleline® Platform PECVD Supports Thin-Film Processing

Plasma-Therm continues to see strong momentum for the Shuttleline® platform, supporting advanced research environments through flexible, high-performance PECVD processing.

The Shuttleline platform supports scalable thin-film processing with strong control over deposition quality, uniformity, and repeatability. Its flexible design enables a wide range of research and development applications.

With PlasmaBox™ PECVD technology, the Shuttleline platform enables advanced semiconductor processing and next-generation materials development.

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Learn more about  TFE Thin Film Equipment products and explore capabilities across the Plasma-Therm portfolio.

Corial Shuttleline platform PECVD system for thin-film deposition
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